%0 Journal Article %T Planar silicon SPADs with 200-ॖm diameter and 35-ps photon timing resolution %A Ghioni, Massimo %A Gulinatti, Angelo %A Maccagnani, Piera %A Rech, Ivan %A Cova, Sergio %J Proceedings of SPIE %V 6372 %N 1 %P 63720R-63720R-9 %@ 0277-786X %D 2006-10-18 %I SPIE %~ DeepDyve