%0 Journal Article
%T In situ aberration measurement method using a phase-shift ring mask
%A Li, Sikun
%A Wang, Xiangzhao
%A Yang, Jishuo
%A Duan, Lifeng
%A Tang, Feng
%A Yan, Guanyong
%A ,
%J Journal of Micro/Nanolithography, MEMS and MOEMS
%V 14
%N 1
%P 011005-011005
%@ 1932-5150
%D 2015-01-01
%I SPIE
%~ DeepDyve