%0 Journal Article
%T A push–pull multi-layered piggyback PZT actuator
%A Nakamura, S.
%A Numasato, H.
%A Sato, K.
%A Kobayashi, M.
%A Naniwa, I.
%J Microsystem Technologies
%V 8
%N 3
%P 149-154
%@ 0946-7076
%D 2002-05-01
%I Springer-Verlag
%~ DeepDyve