%0 Journal Article
%T Low-stress photosensitive polyimide suspended membrane for improved thermal isolation performance
%A Fan, J
%A Xing, R Y
%A Wu, W J
%A Liu, H F
%A Liu, J Q
%A Tu, L C
%J Journal of Micromechanics and Microengineering
%V 27
%N 11
%P 7
%@ 0960-1317
%D 2017-11-01
%~ DeepDyve