%0 Journal Article
%T A model based OPC method to add serifs for corner rounding design of CMOS image sensor
%A Huang, Zengzhi
%A Ni, Lingyun
%A Fujii, Koichi
%A Huang, Xiaolu
%J Proceedings of SPIE
%V 11148
%P 1114813-1114813-7
%@ 0277-786X
%D 2019-09-26
%I SPIE
%~ DeepDyve