%0 Journal Article
%T Composite Polymer-Core Silica-Shell Abrasive Particles during Oxide CMP: A Defectivity Study
%A Armini, S.
%A Whelan, C. M.
%A Maex, K.
%A Hernandez, J. L.
%A Moinpour, M.
%J Journal of the Electrochemical Society
%V 154
%N 8
%P H667-H671
%@ 0013-4651
%D 2007-05-31
%~ DeepDyve