%0 Journal Article
%T Incorporation of chemical amplification in dual insolubilization resists
%A Enomoto, Satoshi
%A Yoshino, Takumi
%A Machida, Kohei
%A Kozawa, Takahiro
%J Japanese Journal of Applied Physics
%V 58
%N 5
%P 6
%@ 0021-4922
%D 2019-05-01
%~ DeepDyve