%0 Journal Article
%T 34.3: High Resolution and High Speed Inspection Equipment for Mini‐LED Substrates
%A Yasuda, Toshiro
%A Kobayashi, Kazuhisa
%A Yamamoto, Yuichi
%A Hamori, Hiroshi
%A Cheng, Wei
%A Ge, Ryan
%A Sugawa, Shigetoshi
%J Sid Symposium Digest of Technical Papers
%V 53
%N S1
%P 363-366
%@ 0097-966X
%D 2022-10-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve