%0 Journal Article
%T Actinic inspection of the extreme ultraviolet optical parameters of lithographic materials enabled by a table-top, coherent extreme ultraviolet source
%A Dorney, Kevin M.
%A Holzmeier, Fabian
%A Kissoon, Nicola N.
%A Larsen, Esben W.
%A Singh, Dhirendra P.
%A Arvind, Shikhar
%A Santra, Sayantani
%A Fallica, Roberto
%A Timmermans, Marina Y.
%A Pollentier, Ivan
%A Makhotkin, Igor A.
%A Philipsen, Vicky
%A De Gendt, Stefan
%A Fleischmann, Claudia
%A van der Heide, Paul A. W.
%A Petersen, John S.
%J Journal of Micro/Nanopatterning, Materials, and Metrology
%V 23
%N 4
%P 041406-041406
%@ 1932-5150
%D 2024-10-01
%I SPIE
%~ DeepDyve