%0 Journal Article
%T Application of Shack-Hartmann wavefront sensing technology to transmissive optic metrology
%A Rammage, Ron R.
%J Proceedings of SPIE
%V 4779
%N 1
%P 161-172
%@ 0277-786X
%D 2002-11-01
%I SPIE
%~ DeepDyve