%0 Journal Article
%T Sacrificial bridges for MEMS fabrication
%A Chang, Chao-Min
%A Chen, Yang-Che
%A Fong, Chien-Fu
%A Guu, Yunn-Horng
%A Chen, Rongshun
%A Yeh, J Andrew
%A Hou, Max T
%J Journal of Micromechanics and Microengineering
%V 21
%N 9
%P 10
%@ 0960-1317
%D 2011-09-01
%~ DeepDyve