%0 Journal Article
%T Micromachined piezoelectric structures for high-temperature sensors
%A Sauerwald, Jan
%A Schulz, Michal
%A Richter, Denny
%A Fritze, Holger
%J Journal of Electroceramics
%V 22
%N 3
%P 180-184
%@ 1385-3449
%D 2007-11-29
%I Springer US
%~ DeepDyve