%0 Journal Article
%T Process optimization of a deep trench isolation structure for high voltage SOI devices
%A Zhu, Kuiying
%A Qian, Qinsong
%A Zhu, Jing
%A Sun, Weifeng
%J Journal of Semiconductors
%V 31
%N 12
%P 4
%@ 1674-4926
%D 2010-12-01
%~ DeepDyve