%0 Journal Article %T Robust tracking control of a piezodriven monolithic flexure-hinge stage %A Huang, Yi-Cheng %A Cheng, Chih-Hao %J "Science China Physics, Mechanics & Astronomy" %V 52 %N 6 %P 926-934 %@ 1674-7348 %D 2009-06-01 %I SP Science in China Press %~ DeepDyve