%0 Journal Article %T Preparation of Silicon Carbide Film by Composite Sintering of Silicon Nitride and Silicon Carbide %A Sun, Wenyue %A Huang, Zhiliang %A Chen, Changlian %A Chen, Song %J Journal of Physics: Conference Series %V 2390 %N 1 %P 6 %@ 1742-6588 %D 2022-12-01 %I IOP Publishing %~ DeepDyve