%0 Journal Article
%T Neutral particle lithography: a simple solution to charge-related artefacts in ion beam proximity printing
%A Wolfe, J C
%A Craver, B P
%J Journal of Physics D: Applied Physics
%V 41
%N 2
%P 12
%@ 0022-3727
%D 2008-01-21
%~ DeepDyve