%0 Journal Article
%T Multiple shifter arrays for repairing phase defects in conjugate twin-shifter phase-shift mask
%A Ohtsuka, Hiroshi
%J Proceedings of SPIE
%V 1927
%N 1
%P 643-654
%@ 0277-786X
%D 1993-08-08
%I SPIE
%~ DeepDyve