%0 Journal Article
%T Electromechanical bending microactuator as optical shutter
%A Kleimanov, R.
%A Enns, Y.
%A Pyatishev, E.
%A Komarevtsev, I.
%J Journal of Physics: Conference Series
%V 1124
%N 8
%P 5
%@ 1742-6596
%D 2018-12-01
%~ DeepDyve