%0 Journal Article %T Rib-type polyimides and polyimide-silica hybrid arrayed waveguide grating simulation and fabrication %A Liu, Wen-Jen %A Lai, Yin-Chieh %A Weng, Min-Hang %A Chen, Chih-Min %J Proceedings of SPIE %V 5723 %N 1 %P 297-306 %@ 0277-786X %D 2005-04-04 %I SPIE %~ DeepDyve