%0 Journal Article
%T Spatially controlled nano-structuring of silicon with femtosecond vortex pulses
%A Rahimian, M. G.
%A Jain, A.
%A Larocque, H.
%A Corkum, P. B.
%A Karimi, E.
%A Bhardwaj, V. R.
%J Scientific Reports
%V 10
%N 1
%D 2020-07-28
%I Nature Publishing Group UK
%~ DeepDyve