%0 Journal Article %T Processing and Characterization of Ta 2 O 5 Films Deposited by Pulsed Laser Ablation %A Qin, Qi‐Zong %A Fu, Zheng‐Wen %J Advanced Materials %V 11 %N 13 %P 1119-1123 %@ 0935-9648 %D 1999-09-01 %I Wiley Subscription Services, Inc., A Wiley Company %~ DeepDyve