%0 Journal Article %T HCG MEMS tunable VCSEL with intracavity integrated detector %A Mateus, Carlos F. R. %A Ellafi, Dalila %A Cao, Chuanshun %A Ford, Virgil Carl %A Bandyopadhyay, Neelanjan %A Hui, Kai-C. A. %A Chase, Christopher %A Worland, D. Philip %J Proceedings of SPIE %V 12439 %P 1243906-1243906-6 %@ 0277-786X %D 2023-03-15 %I SPIE %~ DeepDyve