%0 Journal Article
%T Can remote SEM contours be used to match various SEM tools in fabs?
%A Pradelles, Jonathan
%A Perraud, Loïc
%A Sezestre, Elie
%A Fay, Aurélien
%A Schuch, Nivea
%A Figueiro, Thiago
%A Robert, Frédéric
%J Proceedings of SPIE
%V 12496
%P 124960U-124960U-13
%@ 0277-786X
%D 2023-04-27
%I SPIE
%~ DeepDyve