%0 Journal Article
%T Passivation of InSb photodetectors with atomic layer deposited Al2O3
%A Cui, Ailiang
%A Zhu, Xubo
%A Ji, Zhenming
%A Wei, Peng
%A Lv, Yanqiu
%J Proceedings of SPIE
%V 12505
%P 125050S-125050S-6
%@ 0277-786X
%D 2023-01-31
%I SPIE
%~ DeepDyve