%0 Journal Article
%T MEMS deformable mirror actuators with enhanced reliability
%A Cornelissen, S. A.
%A Bifano, T. G.
%A Bierden, P. A.
%J Proceedings of SPIE
%V 8253
%N 1
%P 825306-825306-7
%@ 0277-786X
%D 2012-01-24
%I SPIE
%~ DeepDyve