%0 Journal Article
%T Temperature Dependences of the Sputtering of Negative Silicon Cluster Ions
%A Atabaev, B. G.
%A Dzabbarganov, R.
%A Yuzikaeva, F. R.
%A Permukhamedova, M. A.
%A Shaymardanov, Z. Sh.
%A Khalmatov, A. S.
%J Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques
%V 17
%N Suppl 1
%P S413-S415
%@ 1027-4510
%D 2023-12-01
%I Pleiades Publishing
%~ DeepDyve