%0 Journal Article
%T A novel solution to improve saddle-shape warpage in 3D NAND flash memory
%A Shi, Dandan
%A Xia, Zhiliang
%A Hu, Ming
%A Mei, Guozhu
%A Huo, Zongliang
%J Semiconductor Science and Technology
%V 35
%N 4
%P 6
%@ 0268-1242
%D 2020-04-01
%~ DeepDyve