%0 Journal Article
%T Chemical mechanical polishing characteristics of ITO thin film prepared by RF magnetron sputtering
%A Lee, Kang-Yeon
%A Choi, Gwon-Woo
%A Kim, Yong-Jae
%A Choi, Youn-Ok
%A Kim, Nam-Oh
%J "Journal of the Korean Physical Society"
%V 60
%N 3
%P 388-392
%@ 0374-4884
%D 2012-02-01
%I The Korean Physical Society
%~ DeepDyve