%0 Journal Article
%T Machine learning enabled optimization of showerhead design for semiconductor deposition process
%A Jin, Zeqing
%A Lim, Dahyun Daniel
%A Zhao, Xueying
%A Mamunuru, Meenakshi
%A Roham, Sassan
%A Gu, Grace X.
%J Journal of Intelligent Manufacturing
%V 35
%N 2
%P 925-935
%@ 0956-5515
%D 2024-02-01
%I Springer US
%~ DeepDyve