%0 Journal Article
%T Design of resist stacks with antireflection coatings from the viewpoint of focus budget
%A Nagai, Satoshi
%J Proceedings of SPIE
%V 7274
%N 1
%P 72741H-72741H-10
%@ 0277-786X
%D 2009-03-13
%I SPIE
%~ DeepDyve