%0 Journal Article
%T A self-learning method for automatic alignment in wafer processing
%A Kim, Hyung-Tae
%A Lee, Kang-Won
%A Yang, Hae-Jeong
%A Kim, Sung-Chul
%J "International Journal of Precision Engineering and Manufacturing"
%V 14
%N 2
%P 215-221
%@ 2234-7593
%D 2013-02-01
%I Korean Society for Precision Engineering
%~ DeepDyve