%0 Journal Article
%T MEMS-based gas flow sensors
%A Wang, Yu-Hsiang
%A Chen, Chang-Pen
%A Chang, Chih-Ming
%A Lin, Chia-Pin
%A Lin, Che-Hsin
%A Fu, Lung-Ming
%A Lee, Chia-Yen
%J Microfluids and Nanofluids
%V 6
%N 3
%P 333-346
%@ 1613-4982
%D 2009-01-08
%I Springer-Verlag
%~ DeepDyve