%0 Journal Article
%T Approaching zero etch bias at Cr etch process
%A Nesladek, Pavel 
%A Falk, Norbert
%A Wiswesser, Andreas
%A Koch, Renee
%A Sass, Björn
%J Proceedings of SPIE
%V 5992
%N 1
%P 59920N-59920N-9
%@ 0277-786X
%D 2005-10-21
%I SPIE
%~ DeepDyve