%0 Journal Article
%T Analysis of the influence of tiny mirrors and mechanical holder in the interferometric measurements of piezoceramic displacements operating in a kHz range
%A Nader, Gilder
%J Proceedings of SPIE
%V 5053
%N 1
%P 513-522
%@ 0277-786X
%D 2003-08-12
%I SPIE
%~ DeepDyve