%0 Journal Article
%T Wear-ratio-based tool wear compensation for microelectrodischarge-machining of silicon through process simulation
%A Rao, Muralidhara
%J Journal of Micro/Nanolithography, MEMS and MOEMS
%V 9
%N 1
%P 013040-013040-
%@ 1932-5150
%D 2010-01-01
%I SPIE
%~ DeepDyve