%0 Journal Article
%T On the Control of Plasma Parameters and Active Species Kinetics in CF4+O2+Ar Gas Mixture by CF4/O2 and O2/Ar Mixing Ratios
%A Efremov, Alexander
%A Lee, Junmyung
%A Kim, Jihun
%J Plasma Chemistry and Plasma Processing
%V 37
%N 5
%P 1445-1462
%@ 0272-4324
%D 2017-05-13
%I Springer US
%~ DeepDyve