%0 Journal Article
%T Novel EUV mask black border and its impact on wafer imaging
%A Kodera, Yutaka
%A Fukugami, Norihito
%A Komizo, Toru
%A Watanabe, Genta
%A Ito, Shin
%A Yoshida, Itaru
%A Maruyama, Shingo
%A Kotani, Jun
%A Konishi, Toshio
%A Haraguchi, Takashi
%J Proceedings of SPIE
%V 9776
%P 977615-977615-10
%@ 0277-786X
%D 2016-03-18
%I SPIE
%~ DeepDyve