%0 Journal Article
%T Chapter 12: Microassembly of Integrated Circuits and Micromodules
%A Lanin, V. L.
%A Emel’yanov, V. A.
%A Petuhov, I. B.
%J Surface Engineering and Applied Electrochemistry
%V 60
%N 3
%P 520-552
%@ 1068-3755
%D 2024-06-01
%I Pleiades Publishing
%~ DeepDyve