%0 Journal Article
%T Experimental verification of finite element model prediction of EUVL mask flatness during electrostatic chucking
%A Nataraju, Madhura
%A Van Peski, Chris K.
%J Proceedings of SPIE
%V 6349
%N 1
%P 634939-634939-11
%@ 0277-786X
%D 2006-10-06
%I SPIE
%~ DeepDyve