%0 Journal Article
%T Experimental Investigation of High-Performance Wafer Drying Induced by Marangoni Effect in Post-CMP Cleaning
%A Li, Changkun
%A Zhao, Dewen
%A Lu, Xinchun
%J ECS Journal of Solid State Science and Technology
%V 8
%N 10
%@ 2162-8769
%D 2019-01-01
%~ DeepDyve