%0 Journal Article %T An X-ray TES Detector Head Assembly for a STEM–EDS System and Its Performance %A Hayashi, Tasuku %A Muramatsu, Haruka %A Maehisa, Keisei %A Yamasaki, Noriko %A Mitsuda, Kazuhisa %A Takano, Akira %A Yoshimoto, Shota %A Maehata, Keisuke %A Hidaka, Mutsuo %A Yamamori, Hirotake %A Hara, Toru %J Journal of Low Temperature Physics %V 193 %N 6 %P 1282-1286 %@ 0022-2291 %D 2018-07-31 %I Springer US %~ DeepDyve