%0 Journal Article
%T High-quality AlGaN epitaxial structures and realization of UVC vertical-cavity surface-emitting lasers
%A Zheng, Zhongming
%A Wang, Yukun
%A Hoo, Jason
%A Guo, Shiping
%A Mei, Yang
%A Long, Hao
%A Ying, Leiying
%A Zheng, Zhiwei
%A Zhang, Baoping
%J Science China Materials
%V 66
%N 5
%P 1978-1988
%@ 2095-8226
%D 2023-05-01
%I Science China Press
%~ DeepDyve