%0 Journal Article
%T Comparison of the spatial statistics of random and defined-sequence photoresist films
%A Hinsberg, William D.
%A Houle, Frances A.
%J Journal of Micro/Nanopatterning, Materials, and Metrology
%V 23
%N 4
%P 044601-044601
%@ 1932-5150
%D 2024-10-01
%I SPIE
%~ DeepDyve