%0 Journal Article
%T Control of line width with active nano fountain pen (ANFP) for nano manufacturing
%A Hwang, Kyoil
%A Lee,  Suk-Han
%A Kim,  Youn-Jea
%A Kim,  Hun-mo
%J Journal of Mechanical Science and Technology
%V 22
%N 7
%P 1339-1348
%@ 1738-494X
%D 2008-07-01
%I Korean Society of Mechanical Engineers
%~ DeepDyve