%0 Journal Article
%T An Improved Test Structure and Kelvin‐Measurement Method for the Determination of Integrated Circuit Front Contact Resistance
%A Mazer, J. A.
%A Linholm, L. W.
%A Saxena, A. N.
%J Journal of the Electrochemical Society
%V 132
%N 2
%P 440-443
%@ 0013-4651
%D 1985-02-01
%~ DeepDyve