%0 Journal Article
%T Smart slit assembly employing continuously tunable MEMS shutter
%A Lagosh, Anton
%A Huszka, Gergely
%A Sattari, Hamed
%A Ahlers, Berit
%A Guldimann, Benedikt
%A Kerr, Grégoire
%A Melozzi, Mauro
%A Rahnama, Peyman
%A Nishizawa, Takeshi
%A Quack, Niels
%J Proceedings of SPIE
%V 11697
%P 116970P-116970P-8
%@ 0277-786X
%D 2021-03-05
%I SPIE
%~ DeepDyve