%0 Journal Article
%T Capacitive microbeam resonator design
%A Ahn, Yongchul
%A Guckel, Henry
%A Zook, J David
%J Journal of Micromechanics and Microengineering
%V 11
%N 1
%@ 0960-1317
%D 2001-01-01
%~ DeepDyve