%0 Journal Article
%T Demonstration of broadband chirped grating couplers for MPW fabrication
%A Li, Wenyu
%A Qiu, Jifang
%A Tian, Ye
%A Dong, Zhenli
%A Yu, Zexin
%A Guo, Hongxiang
%A Wu, Jian
%J Proceedings of SPIE
%V 11048
%P 110482R-110482R-4
%@ 0277-786X
%D 2019-02-14
%I SPIE
%~ DeepDyve