%0 Journal Article
%T Investigation of the effect of processing steps on stress in a polysilicon structural membrane
%A Berney, H
%A Hill, M
%A Kelleher, A-M
%A Hynes, E
%A O'Neill, M
%A Lane, W A
%J Journal of Micromechanics and Microengineering
%V 10
%N 2
%@ 0960-1317
%D 2000-06-01
%~ DeepDyve