%0 Journal Article %T Preliminary Study on Automatic Detection of Hard Defects in Integrated Circuits Based on Thermal Laser Stimulation %A Wu, Wenjian %A Ma, Yingqi %A Cai, Minghui %A Han, Jianwei %J Photonics %V 10 %N 5 %@ 2304-6732 %D 2023-05-06 %I Multidisciplinary Digital Publishing Institute %~ DeepDyve